Microelectro-Mechanical Systems :
: Modeling and Prototyping
Text Book and References
Southern California MEMS Resources
MEMS Technology is one of
the most promising and cutting-edge technologies around today with
numerous application areas such as switching devices for broadband
optical networks, biotechnology, mechanical and industrial components
such as gyroscopes, accelerometers, mass media storage (optical disk
drives, CR Rom and DVD drives) and the like. The total market for MEMS
devices is currently estimated to be about $10 billion and is projected
to grow to as much as $25 billion in the next 5-10 years. Electronic and
computer manufacturers, system integrators, manufacturers of
automobiles, scientific analytical instruments, consumer goods, medical
devices, and aerospace navigational systems are some of the
beneficiaries of this technology.
multi-physics and mechanics that govern the behavior of MEMS differ from
their counterparts in the macro world. In addition, not all concepts
well understood at the macro level can be scaled down to at the micro
level. As a result, a recent report on MEMS technology by MEMS-Exchange
stressed that advanced simulation and modeling tools for MEMS are
‘urgently needed’ if the different industries involved in
Nano-technology and MEMS, particularly, are to rapidly and effectively
turn ideas to products. The availability and proliferation of such
advanced numerical modeling tools is critical, particularly, for rapid
prototyping and short design-cycle for MEMS for commercial application
where the time for concept-to-design and prototype is critical.
This course is a direct
response to this need and aims to equip students with a fundamental
understanding of the basic multi-physics that govern the behavior of
most classes of MEMS along with the finite element modeling of typical
MEMS under typical coupling. In this short course, a detailed study of
the multi-physics will be limited to electrostatics but will be
complemented with a brief introduction to thermoelectric actuation,
magneto-structural coupling and piezoelectric coupling.
course is titled: Microelectro-Mechanical Systems: Modeling and
Protyping and will cover the
multi-physics that govern the behavior of typical MEMS and most
importantly the use of Finite Element Method and tools (such as ANSYS)
in predicting the behavior of MEMS under a multitude of physical effects
such as electrostatic loads, stress, heat, electromagnetism and so on.
Both steady state and transient behaviors under iterative analytical
scheme will be investigated.
Practicing mechanical, electrical, optical, manufacturing, bio-medical and reliability engineers involved in analysis, design and manufacturing of mechanical components, optical switching devices, aerospace and bio-medical devices and the like.
Specific Skills Students
will Pick and what they can expect to be able to do when they leave the
We feel that this short
course will immensely benefit the San Diego area engineers who are
involved in the prototyping and manufacturing of MEMS devices such as
optical switching devices.