Text Book and References

Southern California MEMS Resources

CALTECH

Course Objective:

MEMS Technology is one of the most promising and cutting-edge technologies around today with numerous application areas such as switching devices for broadband optical networks, biotechnology, mechanical and industrial components such as gyroscopes, accelerometers, mass media storage (optical disk drives, CR Rom and DVD drives) and the like. The total market for MEMS devices is currently estimated to be about $10 billion and is projected to grow to as much as $25 billion in the next 5-10 years. Electronic and computer manufacturers, system integrators, manufacturers of automobiles, scientific analytical instruments, consumer goods, medical devices, and aerospace navigational systems are some of the beneficiaries of this technology.

The fundamental multi-physics and mechanics that govern the behavior of MEMS differ from their counterparts in the macro world. In addition, not all concepts well understood at the macro level can be scaled down to at the micro level. As a result, a recent report on MEMS technology by MEMS-Exchange stressed that advanced simulation and modeling tools for MEMS are ‘urgently needed’ if the different industries involved in Nano-technology and MEMS, particularly, are to rapidly and effectively turn ideas to products. The availability and proliferation of such advanced numerical modeling tools is critical, particularly, for rapid prototyping and short design-cycle for MEMS for commercial application where the time for concept-to-design and prototype is critical.

This course is a direct response to this need and aims to equip students with a fundamental understanding of the basic multi-physics that govern the behavior of most classes of MEMS along with the finite element modeling of typical MEMS under typical coupling. In this short course, a detailed study of the multi-physics will be limited to electrostatics but will be complemented with a brief introduction to thermoelectric actuation, magneto-structural coupling and piezoelectric coupling.

Course Description:

The course is titled: Microelectro-Mechanical Systems: Modeling and Protyping and will cover the multi-physics that govern the behavior of typical MEMS and most importantly the use of Finite Element Method and tools (such as ANSYS) in predicting the behavior of MEMS under a multitude of physical effects such as electrostatic loads, stress, heat, electromagnetism and so on. Both steady state and transient behaviors under iterative analytical scheme will be investigated.

Who will Benefit

Practicing mechanical, electrical, optical, manufacturing, bio-medical and reliability engineers involved in analysis, design and manufacturing of mechanical components, optical switching devices, aerospace and bio-medical devices and the like.

Specific Skills Students will Pick and what they can expect to be able to do when they leave the class.

Understanding of the basic physics (and multi-physics) governing the behavior and response of such systems.
Creating complete FE Analysis/computer models for MEMS structures, analyzing them, and carrying out post-processing
Lumped parameter modeling for typical MEMS components through the use of an electromechanical transducer element
Basic distributed modeling for steady state analysis
Skill to write structural and electrostatic “physics environment” files.
Basic introduction to thermoelectric actuation, and magneto structural coupling.

Conclusion

We feel that this short course will immensely benefit the San Diego area engineers who are involved in the prototyping and manufacturing of MEMS devices such as optical switching devices.